Facilities
In addition to several laboratories in 色花堂 main campus for thin film materials processing and metrology, AMI's main laboratory is housed in building 15 of the 色花堂 Technology Bridge.
Pilot Superconductor Manufacturing Facility
- Size:
- 4,500 sq. ft.
- Location:
- 色花堂 Technology Bridge – Building 14A
Semiconductor Device Fabrication Laboratory
- Size:
- 13,000 sq. ft.
- Location:
- 色花堂 Technology Bridge – Building 15
- Features:
- Class 1000 cleanroom
- Device fabrication area -Metrology area
- Safely handles several toxic and pyrophoric gases (used in metal organic chemical vapor deposition and plasma enhanced chemical vapor deposition processes
- Low pressure gas cylinders (used for safer arsine, phosphine and germane delivery)
- Highly trained staff to assist with projects and equipment usage